NEXIV VMZ-R3020 - Higher speeds and greater precision than ever before

Standard magnification zooming heads: type 1 - 3

Type 1, 2 and 3, have Nikon 15× zoom optics with a long working distance, wide FOV and a high NA 0.35. They come with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with three incident angles.

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High magnification zooming heads: type 4, TZ

Type 4 and TZ have Nikon 15× and 120× zoom optics with higher magnification and a higher NA 0.46. Type 4 comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with a 50-degree incident angle. TZ has LED episcopic, diascopic (for higher magnification) and darkfield illuminators.

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Wide field-of-view zooming head: type A

Type A features Nikon 10× zoom optics with the widest FOV, the longest working distance and the highest NA 0.11. It comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with an 18-degree incident angle.

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Magnification vs. Field of view (mm)

Standard magnification zooming heads
Type 1
Optical magnification Total magnification Field of View (mm)	0.5× 18× 9.33×7.01	1× 36× 4.7×3.5	2× 72× 2.33×1.75	4× 144× 1.165×0.875	7.5× 270× 0.622×0.467
Type 2
Optical magnification Total magnification Field of View (mm)	1× 36× 4.7×3.5	2× 72× 2.33×1.75	4× 144× 1.165×0.875	8× 288× 0.582×0.437	15× 540× 0.311×0.233
Type 3
Optical magnification Total magnification Field of View (mm)	2× 72× 2.33×1.75	4× 144× 1.165×0.875	8× 288× 0.582×0.437	16× 576× 0.291×0.218	30× 1080× 0.155×0.117

 

High magnification zooming heads
Type 4
Optical magnification Total magnification Field of View (mm)	4× 144× 1.165×0.875	8× 288× 0.582×0.437	16× 576× 0.291×0.218	32× 1152× 0.146×0.109	60× 2160× 0.07×0.068
Type TZ
Optical magnification Total magnification Field of View (mm)	1× 36×  4.7×3.5	2× 72× 2.33×1.75	4× 144× 1.165×0.875	7.5× 270× 0.622×0.467	16× 576× 0.291×0.218
	32× 1152× 0.146×0.109	64× 2304× 0.073×0.055	120× 4320× 0.039×0.029

 

Wide field-of-view zooming head
Type A
Optical magnification Total magnification Field of View (mm)	0.35× 12.6× 13.3×10	0.6× 21.6× 7.8×5.8	1× 36×  4.7×3.5	1.8× 64.8× 2.6×1.9	3.5× 126× 1.33×1

 

* Total magnification is that of a video window with 640 × 480 pixels on a 24-inch WUXGA monitor (1920 × 1200 pixels) recommended for the VMZ-R series.

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Detection of 0.1 mm transparent layer

Designed to detect the surfaces of thin transparent materials, the new TTL Laser AF works with the same high speed and high accuracy as the VMR series Laser AF.

Focus on top surface in redFocus on bottom surface in blueNew TTL Laser AF The new sensor detects laser beams reflected on both top and bottom surfaces

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8-segment ring illumination with three incident angles

Standard magnification zooming heads (type 1-3) come with 8-segment LED inner and outer ring illuminators as well as episcopic and diascopic illuminators. Incident angles of 37, 55 and 75 degrees, illumination directions by combining any 8-segment lights and light intensity can be adjusted.

 

* The incident angle of the 8-segment ring illuminator for type 4 is 50 degrees and for type A is 18 degrees.

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Measuring accuracy is further improved

Measuring accuracy is further improved with high resolution linear encoder 'ModuRay' developed by Nikon.

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Faster throughput

High rate of data transfer combined with fast illumination control provides faster throughput.

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15x High-speed Zoom

5-step high-speed zoom with a zoom ratio of 15x allows both wide field-of-view at low magnification and high-resolution observation at high magnification (type 1 – 4).

 

 

Specifications

Stroke (X x Y x Z)	300 x 200 x 200 mm (11.8 x 7.8 x 7.8 in.) 250 x 200 x 200 mm (9.8 x 7.8 x 7.8 in.) (with type TZ at low magnification)
Minimum readout	0.01 µm
Maximum workpiece weight	20 kg (44.1 lb.)
Measuring uncertainty	EUX,MPE EUY,MPE: 1.2+4L/1000 μm EUXY, MPE: 2+4L/1000 μm
Z measurement uncertainty	EUZ,MPE: 1.2+5L/1000 μm (with Laser AF)
Camera	Black & white 1/3” CCD, Color 1/3” CCD (option)* * For type 1, 2 and A only
Working distance	Type 1/2/3: 50 mm (with 37° illumination), 36 mm (with 55° illumination), 10 mm (with 78° illumination) Type 4: 30 mm Type TZ: 11 mm with the main objective lens and 32 mm with the left objective lens Type A: 73.5mm (63 mm with laser AF)
Magnification vs. field of view	Type 1: 0.5 - 7.5x / 9.33 x 7 - 0.622 x 0.467 mm Type 2: 1 - 15x / 4.67 x 3.5 - 0.311 x 0.233 mm Type 3: 2 - 30x / 2.33 x 1.75 - 0.155 x 0.117 mm  Type 4: 4 - 60x / 1.165 x 0.875 - 0.07 x 0.068 mm  Type TZ: 1 - 120x / 4.67 x 3.5 - 0.039 x 0.029 mm  Type A: 0.35 - 3.5x / 13.3 x 10 - 1.33 x 1 mm
Auto focus	Type 1, 2, 3, 4 and TZ come with TTL laser AF and vision AF. Type A comes with vision AF as standard and with laser AF as an option.
Illumination	Type 1/2/3: LED episcopic and diascopic illuminators, 8-segment LED inner and outer ring illuminators (37 degree incident angle with inner ring and 55 and 78 degree incident angles with outer ring)  Type TZ: LED episcopic, diascopic (for main objective lens) and darkfield illuminators  Type 4/A: LED episcopic and diascopic illuminators, 8-segment LED ring illuminator (with oblique angle of 50 degree: type 4, 18 degree: type A)
Power source	AC 100-240V 50/60Hz
Power consumption	5A-2.5A
Dimensions & weight (W x D x H)	Main unit & table: 700 x 730 x 1795 mm / 245 kg (27.5 x 28.7 x 70.6 in. / 540lb.) Controller: 190 x 450 x 440 / 15 kg (7.5 x 17.7 x 17.3 in. / 33 lb.)
Footprint	2100 x 1100 mm